JPS6367351B2 - - Google Patents

Info

Publication number
JPS6367351B2
JPS6367351B2 JP59150836A JP15083684A JPS6367351B2 JP S6367351 B2 JPS6367351 B2 JP S6367351B2 JP 59150836 A JP59150836 A JP 59150836A JP 15083684 A JP15083684 A JP 15083684A JP S6367351 B2 JPS6367351 B2 JP S6367351B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
layer
semiconductor
growth
growth chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59150836A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129190A (ja
Inventor
Masahito Mushigami
Haruo Tanaka
Hayamizu Fukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP15083684A priority Critical patent/JPS6129190A/ja
Publication of JPS6129190A publication Critical patent/JPS6129190A/ja
Publication of JPS6367351B2 publication Critical patent/JPS6367351B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Semiconductor Lasers (AREA)
JP15083684A 1984-07-19 1984-07-19 半導体レ−ザの製造方法 Granted JPS6129190A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15083684A JPS6129190A (ja) 1984-07-19 1984-07-19 半導体レ−ザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15083684A JPS6129190A (ja) 1984-07-19 1984-07-19 半導体レ−ザの製造方法

Publications (2)

Publication Number Publication Date
JPS6129190A JPS6129190A (ja) 1986-02-10
JPS6367351B2 true JPS6367351B2 (en]) 1988-12-26

Family

ID=15505438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15083684A Granted JPS6129190A (ja) 1984-07-19 1984-07-19 半導体レ−ザの製造方法

Country Status (1)

Country Link
JP (1) JPS6129190A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02256535A (ja) * 1989-03-30 1990-10-17 Asahi Glass Co Ltd 車両用警告灯

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196897B1 (en) * 1985-04-02 1992-01-22 Fujitsu Limited Thermal etching of a compound semiconductor
JP2658717B2 (ja) * 1992-02-12 1997-09-30 トヨタ自動車株式会社 シフトバイワイヤ自動変速機用変速制御装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100583A (ja) * 1982-12-01 1984-06-09 Hitachi Ltd 半導体レ−ザ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02256535A (ja) * 1989-03-30 1990-10-17 Asahi Glass Co Ltd 車両用警告灯

Also Published As

Publication number Publication date
JPS6129190A (ja) 1986-02-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term